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Chemistry of Atomic Layer Deposition Eriskay Connection authorizing them to go toThis book will help chemists and non chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface. Author: Sen Thomas Barry Publisher: de Gruyter Published: 11 08 2021
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