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Part No: Operator Panel
img{max-width:100%} ASM 03-320142D01 EV Interface Pneumatic Block PCB Assembly ASM Epsilon 3000 Used
Inventory # A-15214
Daughterboard Part No: E281-000017-41
img{max-width:100%} TEL Tokyo Electron PHP Pneumatic Control Panel ACT12-300 300mm Working Surplus
Digital Dynamics 27-053659-00 sioc Controller Module Novellus Used Working Part No: Operator PanelDigital Dynamics 27 053659 00 sioc Controller Module Novellus Used Working Inventory # A 2050 This Digital Dynamics 27 053659 00 Sioc Controller Module is used working surplus. The physical condition is good, but there are signs of previous use and handling. The unit has some scuffs and stains to the outer case (see photos). Specifications Part No: 27 053659 00 Model No: sioc CONTROLLER Software Version: Revision B, Ver. 4. 6 Sale Details Item
