Yokogawa FA-M3 Factory ACE PLC ROBO5000 TEL T4DS1-02685-10007 500090811 New CYCLO-C5F8(

CYCLO-C5F8(

img{max-width:100%} AMAT Applied Materials 0010-30432 150mm Wafer Heater Pedestal Working Spare

AMAT Applied Materials Part No: 0015-02993

Electrical Diagram No: 4T070-334-1

Removed from a Veeco Microetch 1201 Ion Beam Etching System Installed Component

Yokogawa FA-M3 Factory ACE PLC ROBO5000 TEL T4DS1-02685-10007 500090811 New CYCLO-C5F8(Yokogawa FA M3 Factory ACE PLC ROBO5000 TEL T4DS1 02685 10007 500090811 New Model No: FA M3 Factory ACE IPN: 500090811 TEL Tokyo Electron Part No: T4DS1 02685 10007 ROBO5000 MAIN UNIT Installed Modules Part No: F3PU30 0N, POWER SUPPLY, PU30 0N Part No: F3RP40 2P L1, RTOS CPU, RP41 2P Part No: F3LD01 0N, DEVICENET I F, LD01 0N Part No: F3RZ82 0F C11, RS232 INTERFACE, RZ82 0F Part No: F3LR01 0N, FABUS,LR01 0N Part No: F3BUB09 0N, S939DQ 03 This item is