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Tylan FC-2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used STE 20061966

SKU: 59825553963
4.0
USD125.57 USD154.57

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Description

STE 20061966

Part No: VDJB0013203

Removed from a Lam Research 4420 Rainbow Plasma Etcher System This Lam Research 715-12165-8 200mm Robot Arm End Effector is used working surplus

Output Module H4: 3

Tylan General FC-2900MEP Mass Flow Controller MFC 200 SCCM N2O Used Working

Tylan FC-2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used STE 20061966Tylan FC 2979MEP5 MFC Mass Flow Controller 200 SCCM SF6 TEL Unity II Used Inventory # A 14119 This Tylan FC 2979MEP5 MFC Mass Flow Controller is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: FC 2979MEP5 Model No: 2979 Series Range Gas: 200 SCCM, SF6 Interface: 9 Pin D Connector: Surface Mount CE Marked May Require Calibration Removed from a TEL Tokyo Electron U2 855DD

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