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It is a part for an AMAT Endura 200mm
Model No: DF9300864-C0
Part No: 103F7851-80HXL4
The plate is not marked with the part number
Lam Research Part No: 17035-1-B-6562347
ASML 4022.428.1556 Power Amplifier PCB Card PAS 5000/2500 Wafer Stepper Used It is a part forASML 4022. 428. 1556 Power Amplifier PCB Card PAS 5000 2500 Wafer Stepper Used Inventory # 17475 This ASML 4022. 428. 1556 is used working surplus. The unit has a broken plastic screw tab (see photos). The physical condition is good, but there are signs of previous use and handling. Removed from a ASML PAS 5000 2500 Wafer Stepper System. Specifications Part No: 4022. 428. 1556 Model No: POWER AMP. Removed from a ASML PAS 5000 2500 Wafer Stepper System
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